FORMATION MECHANISM AND SURFACE EVOLUTION OF SILVER FILMS SPUTTERING DEPOSITED ON SILICONE OIL SUBSTRATES

Sen-Jiang Yu () and Yong-Ju Zhang
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Sen-Jiang Yu: Department of Physics, China Jiliang University, Hangzhou 310018, China;
Yong-Ju Zhang: Department of Physics, Taizhou University, Linhai 317000, China;

Surface Review and Letters (SRL), 2008, vol. 15, issue 05, 525-530

Abstract: The formation mechanism and surface evolution of thin silver films deposited on silicone oil substrates by a DC-magnetron sputtering method are reported. As the film thickness increases, the deposited silver atoms first form compact clusters, then transfer to ramified aggregates and finally form a continuous film on the liquid substrate. After deposition, the surface morphology of the silver film is susceptible to evolve successively in the atmosphere condition, resulting in the formation of broad cracks and straight-sided (or worm-like) wrinkles. The evolution behaviors and underlying physical mechanisms of the cracks and wrinkles are presented and discussed in detail.

Keywords: Thin film; liquid substrate; internal stress; surface evolution (search for similar items in EconPapers)
Date: 2008
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DOI: 10.1142/S0218625X0801172X

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