UNDERLAYER ROUGHNESS INFLUENCE ON THE PROPERTIES OFAgTHIN FILM

Pei Zhao, Reng Wang, Dingquan Liu, Fengshan Zhang, Weitao Su () and Xiaofeng Xu
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Pei Zhao: Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
Reng Wang: Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
Dingquan Liu: Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
Fengshan Zhang: Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
Weitao Su: Institute of Materials Physics, Hangzhou Dianzi University, Hangzhou 310018, China
Xiaofeng Xu: Sciences College, Donghua University, Shanghai 200051, China

Surface Review and Letters (SRL), 2008, vol. 15, issue 06, 787-791

Abstract: The effects of the roughness ofZnSunderlayer on the microstructure, optical, and electrical properties of nanometerAgthin film have been investigated in this paper. NanometerAgthin films inglass/ZnS/7.5 nmAg/30 nmZnSstacks have been deposited and analyzed. In the stacks, the underlayers ofZnShave been sputtered with various thicknesses to generate various surface roughnesses. The X-ray diffraction (XRD) has been used to study the crystal structure ofAgfilms. The surface topography and the roughness ofZnSunderlayer have been analyzed by atomic force microscopy. The sheet resistant will become larger as the increasing of the roughness. The optical constants can be derived by fitting the transmission and reflectance spectrum. From optical constants comparison ofAgfilms, with the surface of the stack becoming rougher, it was found that the refractive index will increase but the extinction coefficient will decrease.

Keywords: Thin silver films; roughness; optical properties (search for similar items in EconPapers)
Date: 2008
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DOI: 10.1142/S0218625X08012062

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