SURFACE AND QUALITY MODIFICATION OF DIAMOND-LIKE CARBON FILMS BYCO2LASER HEATING ASSISTED HOT FILAMENT CHEMICAL VAPOR DEPOSITION

Vittaya Amornkitbamrung and Ong-On Topon
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Vittaya Amornkitbamrung: Integrated Nanotechnology Research Center, Department of Physics, Faculty of Science, Khon Kaen University, Khon Kaen 40002, Thailand
Ong-On Topon: Integrated Nanotechnology Research Center, Department of Physics, Faculty of Science, Khon Kaen University, Khon Kaen 40002, Thailand

Surface Review and Letters (SRL), 2008, vol. 15, issue 06, 911-917

Abstract: An infraredCO2laser was used for regional heating to study the heating effect on hot filament chemical vapor deposition of diamond-like carbon formation onSi(100)face substrates. The substrate surface temperature was about 450–500°C. The power of the laser called low, medium, and high raised the temperature of the substrate locally by 25, 45, and 55°C, respectively. At medium laser power, at the central laser beam region, a narrow Raman peak centered at 1438 cm-1was detected. It can be concluded that this region has good-quality DLC. This moderate high-frequency peak corresponds to a fourfold-rotation-symmetry atom in an amorphous carbon network from the tight-binding molecular dynamics simulation of Wang and Ho.

Keywords: DLC; laser heating; Raman spectroscopy; SEM; UV-vis (search for similar items in EconPapers)
Date: 2008
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DOI: 10.1142/S0218625X08012128

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