EFFECT OF THEC2H2ANDN2FLOW RATE ON NANOCOMPOSITEnc-ZrCN/a-C:H(N)FILM SYNTHESIZED BY FILTERED CATHODIC VACUUM ARC TECHNIQUE

Kui Zhou, Xianying Wu, Xu Zhang (), Lizhao Qin and Bin Liao
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Kui Zhou: Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China
Xianying Wu: Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China
Xu Zhang: Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China
Lizhao Qin: Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China
Bin Liao: Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China

Surface Review and Letters (SRL), 2008, vol. 15, issue 06, 781-786

Abstract: Nanocompositenc-ZrCN/a-C:H(N)films were prepared by filtered cathodic vacuum arc technique using theC2H2andN2gas as the precursor. The effect of theC2H2andN2flow rate on the microstructure, internal stress, phase composition, and mechanical properties of nanocompositenc-ZrCN/a-C:H(N)films has been investigated by glancing incidence X-ray diffraction (GIXRD), surface profiler, and X-ray photoelectron spectroscopy(XPS). It was revealed that theC2H2andN2flow rate affected the structure,Zrcontent, and internal stress of the films significantly. Furthermore, XRD pattern indicated the presence of theZrCNcrystalline grains in the range of 3–10 nm, and the deconvolution results for XPS spectra showed that the film mainly was constituted byZr–C,C=C(sp2) andC–C(sp3) bonds.

Keywords: Filtered cathodic vacuum arc technique; nanocompositenc-ZrCN/a-C:H(N); flow rate (search for similar items in EconPapers)
Date: 2008
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DOI: 10.1142/S0218625X08012207

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