EFFECT OF SPECIMEN SIZE ON YOUNG'S MODULUS OF ELECTRODEPOSITEDNi

Hong Wang, Rui Liu, Sheng-Ping Mao, Jun Tang, Cong-Chun Zhang and Gui-Fu Ding
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Hong Wang: Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China
Rui Liu: Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China
Sheng-Ping Mao: Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China
Jun Tang: Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China
Cong-Chun Zhang: Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China
Gui-Fu Ding: Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China

Surface Review and Letters (SRL), 2009, vol. 16, issue 02, 303-307

Abstract: The Young's moduli of electrodepositedNiwith different dimensions were measured carefully in this paper. The dimensions of tensile specimens were 200, 35, or 5 μm thick and 2400, 200 or 50 μm wide. These specimens were measured with three different approaches. The measured Young's moduli ofNidecrease from 122.1 ± 4.3 to 92 ± 5.2 GPa when the thickness changes from 200 to 5 μm and width changes from 2400 to 50 μm.

Keywords: Specimen size; Young's modulus; electrodepositedNi; MEMS (search for similar items in EconPapers)
Date: 2009
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DOI: 10.1142/S0218625X09012639

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