RAMAN, DIELECTRIC AND OPTICAL INVESTIGATIONS OF DLC THIN FILMS

Rasoul Malekfar (), Hamid Motahari, Jalal Rohollahnejad and Fatemeh Sahraiyan
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Rasoul Malekfar: Physics Department, Tarbiat Modares University, Tehran P. O. Box 14115-175, I. R., Iran
Hamid Motahari: Physics Department, Tarbiat Modares University, Tehran P. O. Box 14115-175, I. R., Iran
Jalal Rohollahnejad: Physics Department, Tarbiat Modares University, Tehran P. O. Box 14115-175, I. R., Iran
Fatemeh Sahraiyan: Physics Department, Islamic Azad University, North Tehran Branch, Darband, Tehran, I. R., Iran

Surface Review and Letters (SRL), 2009, vol. 16, issue 05, 731-736

Abstract: Diamond-like carbon, DLC, thin films which is an amorphous hydrogenated form of carbon,a-C:H, has been synthesized by CVD method. SEM imaging, back-scattering Raman spectroscopy and reflected FT-IR spectroscopy have been used for characterization of the synthesized thin films. Kramers–Kronig dispersion relations have been used for the calculation of dielectric and optical parameters, which include the real and imaginary parts of the refractive and dielectric indices. In Raman spectroscopy, two obvious, wide and almost symmetrical peaks around 1355 cm-1(D mode) and 1520–1550 cm-1(G mode), clarify the formation ofa-C:Hthin film. Reflected spectra of thin films, in the spectral region of 400–4000 cm-1, have been recorded by the near normal FTIR reflection spectroscopy and show some peaks which can be assigned to the bending ofsp3C–C,sp3orsp2CH. The calculated data show that dielectric and optical parameters are almost independent of wavenumber.

Keywords: DLC; thin film; Raman scattering; hardness; optical (search for similar items in EconPapers)
Date: 2009
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DOI: 10.1142/S0218625X09013190

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