COMPUTATIONAL FLUID DYNAMICS ANALYSIS OF FABRICATED MICRONOZZLE FOR SUPERSONIC PARTICLE DEPOSITION

Kyubong Jung, Woojin Song, Doo-Man Chun, Jun-Cheol Yeo, Min-Saeng Kim, Sung-Hoon Ahn and Caroline Sunyong Lee ()
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Kyubong Jung: Division of Materials and Chemical Engineering, Hanyang University, Gyeonggi-do 426-791, Korea
Woojin Song: Division of Materials and Chemical Engineering, Hanyang University, Gyeonggi-do 426-791, Korea
Doo-Man Chun: School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151-742, Korea
Jun-Cheol Yeo: School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151-742, Korea
Min-Saeng Kim: School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151-742, Korea
Sung-Hoon Ahn: School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151-742, Korea
Caroline Sunyong Lee: Division of Materials and Chemical Engineering, Hanyang University, Gyeonggi-do 426-791, Korea

Surface Review and Letters (SRL), 2010, vol. 17, issue 01, 45-49

Abstract: A micronozzle was applied in nanoparticle deposition system (NPDS) for supersonic deposition. To determine whether suitable behavior of supersonic fluid can be produced or not, computational fluid dynamics (CFD) flow analysis was used.Niparticles were successfully deposited using the fabricated micronozzle in NPDS at room temperature. It was found that shorter micronozzle with larger side profile deposits wide and thick film compared to the deposition using long micronozzle with smaller side profile. These experimental results agree with the simulation results.

Keywords: Bosch process; nanoparticle deposition system (NPDS); micronozzle; deep reactive-ion etching (DRIE); computational fluid dynamics (CFD) (search for similar items in EconPapers)
Date: 2010
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DOI: 10.1142/S0218625X10013758

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