DEPOSITION OFAl2O3POWDERS USING NANO-PARTICLE DEPOSITION SYSTEM

Woojin Song, Kyubong Jung, Doo-Man Chun, Sung-Hoon Ahn and Caroline Sunyong Lee ()
Additional contact information
Woojin Song: Division of Materials and Chemical Engineering, Hanyang University, Ansan, Gyeonggi-do, Korea
Kyubong Jung: Division of Materials and Chemical Engineering, Hanyang University, Ansan, Gyeonggi-do, Korea
Doo-Man Chun: School of Mechanical and Aerospace Engineering, Seoul National University, Seoul, Korea
Sung-Hoon Ahn: School of Mechanical and Aerospace Engineering, Seoul National University, Seoul, Korea
Caroline Sunyong Lee: Division of Materials and Chemical Engineering, Hanyang University, Ansan, Gyeonggi-do, Korea

Surface Review and Letters (SRL), 2010, vol. 17, issue 02, 189-193

Abstract: In this paper, alumina film was deposited using supersonic micronozzle in nano-particle deposition System (NPDS). Powder deposition at room temperature is important in the field of film deposition since high processing temperature can be a serious limitation for the deposition on flexible substrate. Previously, many studies have been reported on particle deposition, such as aerosol deposition method (ADM) or cold spray method. However, these deposition methods cannot be applied to various types of powders. Recently, NPDS using aluminum nozzle was designed to resolve these problems but it cannot deposit precise patterns less than 1 mm. In this study, alumina particles were deposited using Silicon-based micronozzle in NPDS. Three-dimensional silicon micronozzle was fabricated using semiconductor processing method, specifically deep reactive ion etching (DRIE) method. The silicon micronozzle fabricated by Bosch process is advantageous over the conventionally used nozzle, since the hardness of silicon is higher than that of aluminum and the lifetime can be increased. In this study, alumina nano-particles were accelerated to supersonic level at the neck of micronozzle and deposited on the substrate in a low vacuum condition. The film characteristics were evaluated using field-emission scanning electronic microscope (FE-SEM) and alpha step to measure its thickness of the deposited layer. The deposition result showed that alumina powders were successfully deposited using the fabricated micronozzle by means of NPDS.

Keywords: Alumina powers; micronozzle; DRIE; NPDS (search for similar items in EconPapers)
Date: 2010
References: View complete reference list from CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X10013710
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:17:y:2010:i:02:n:s0218625x10013710

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X10013710

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().