INFLUENCE OF ADHESION LAYERS ON THE SURFACE MORPHOLOGY OF PLATINUM-BASED BOTTOM ELECTRODES FORPb(Zr,Ti)O3THIN FILMS

Nguyen Thanh Huy () and Vu Ngoc Hung ()
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Nguyen Thanh Huy: Hanoi Advanced School of Science and Technology (HAST), Hanoi University of Technology, 40 Ta Quang Buu, Hanoi, Vietnam
Vu Ngoc Hung: International Training Institute for Materials Science (ITIMS), Hanoi University of Technology, 1 Dai Co Viet, Hanoi, Vietnam

Surface Review and Letters (SRL), 2011, vol. 18, issue 01n02, 47-51

Abstract: A thin adhesion layer is required to gluePtbottom electrodes of ferroelectricPb(Zr,Ti)O3thin films to aSiO2/Siwafer. Here we report the effect of adhesion layers,TiandTiO2, on the crystalline structure and surface properties ofPtelectrode. The results show that the hillock formation is observed for the case ofTiglue layer, while the surface ofPtlayer is flat and uniform withTiO2layer used instead. The crystallization in PZT thin films onPt/TiO2/SiO2/Sisubstrate is investigated during post-deposition annealing. The perovskite phase is completely formed in the film annealed at 650°C for one hour.

Keywords: Adhesion layer; PZT thin films (search for similar items in EconPapers)
Date: 2011
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DOI: 10.1142/S0218625X11014400

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