EFFECT OF SUBSTRATE TEMPERATURE ON THE GROWTH AND PROPERTIES OFZnO:AlTHIN FILMS

Jinsong Lei () and Yinsheng Zou
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Jinsong Lei: College of Civil Engineering, Hunan University, Changsha, Hunan 410082, China;
Yinsheng Zou: College of Civil Engineering, Hunan University, Changsha, Hunan 410082, China

Surface Review and Letters (SRL), 2012, vol. 19, issue 02, 1-5

Abstract: ZnO:Al(AZO) transparent conductive films used for solar cells were prepared by DC magnetron sputtering technology. The influence of substrate temperature on the electrical and optical properties of the films was studied. Further, the AZO films prepared were etched in diluted hydrochloric acid. The film surface morphology after etching for different time was researched.

Keywords: ZnO:Al(AZO) films; magnetron sputtering technology; substrate temperature; structure; etching (search for similar items in EconPapers)
Date: 2012
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DOI: 10.1142/S0218625X1250014X

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