OPTICAL PROPERTIES OF THE OXIDATION OFCuTHIN FILMS PREPARED BY THERMAL EVAPORATION

Guozhong Lai (), Huiqing Lan, Suanzhi Lin, Yan Qu and Fachun Lai
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Guozhong Lai: School of Physics and Electromechanical Engineering, Longyan University, Longyan 364012, P. R. China
Huiqing Lan: College of Physics and Energy, Fujian Normal University, Fuzhou 350108, P. R. China
Suanzhi Lin: College of Physics and Energy, Fujian Normal University, Fuzhou 350108, P. R. China
Yan Qu: College of Physics and Energy, Fujian Normal University, Fuzhou 350108, P. R. China
Fachun Lai: College of Physics and Energy, Fujian Normal University, Fuzhou 350108, P. R. China

Surface Review and Letters (SRL), 2013, vol. 20, issue 01, 1-8

Abstract: Copper films with 87 nm thickness were deposited on quartz substrates by thermal evaporation. In order to investigate the oxidation process, theCufilms were oxidized at different temperatures in air with different durations to obtain the complete and uncompleted copper oxide films. The structure and optical properties of the samples were studied by X-ray diffraction, scanning electron microscopy and spectrophotometer, respectively. It is found that the sample oxidized at 220°C for 200 min isCu2Ofilm with 106 nm thickness. Both the transmittance and reflectance of the samples increase with the increase of oxidation duration. The optical constants of theCufilm and theCu2Ofilm were retrieved by simulating the reflectance or transmittance based on the optical dielectric models. The optical constants of theCuandCu2Omixed layer with different composition were calculated by the effective medium theories. Adjusting the mixed layers composition and thickness, andCu2Olayer thickness, the transmittance and reflectance of the uncompleted oxidation films were simulated by optical multilayer design software. The results show that the uncompleted oxidation films consist of theCuandCu2Omixed layers andCu2Olayer. According to the parabolic rate law, the increase rate ofCu2Olayer thickness for the uncompleted oxide films at 200°C is 1.6 nm s-1/2.

Keywords: Oxidation; copper film; optical properties; optical constants (search for similar items in EconPapers)
Date: 2013
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DOI: 10.1142/S0218625X1350011X

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