DETERMINATION OF PHYSICAL RESPONSE IN (Mo/AlN) SAW DEVICES

J. C. Caicedo (), J. A. Pérez, H. H. Caicedo and H. Riascos
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J. C. Caicedo: Tribology Polymers, Powder Metallurgy and Processing of Solid Waste Research Group, Universidad del Valle, Cali – Colombia, Colombia
J. A. Pérez: Synchrotron Radiation and Particle Accelerators, Universidad Autónoma Barcelona, Spain;
H. H. Caicedo: Department of Bioengineering, University of Illinois at Chicago, IL 60612, USA;
H. Riascos: Departamento de Física, Universidad Tecnológica de Pereira, Grupo Plasma, Láser y Aplicaciones A. A 097, Colombia

Surface Review and Letters (SRL), 2013, vol. 20, issue 02, 1-15

Abstract: This paper describes the experimental conditions in surface acoustic wave (SAW) designed on aluminum nitride (AlN) films grown onSi3N4substrates by using pulsed laser deposition. Moreover it was studied the dependency of optical properties with temperature of deposition. The thickness, measured by profilometry technology, was 150 nm for all films. Moreover, SAW devices with aMo/AlN/Si3N4configuration were fabricated employingAlNbuffer andMoChannel. The morphology and composition of the films were studied using atomic force microscopy (AFM), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy analysis (XPS), respectively. The optical reflectance spectra and color coordinates of the films were obtained by optical spectral reflectometry technique in the range of 400–900 cm-1. In this work, a clear dependence in morphological properties, optical properties, frequency response and acoustic wave velocity as function of applied deposition temperature was found. It was also observed a reduction in reflectance of about 10% and an increase of acoustic wave velocity of about 1.2% when the temperature was increased from 200°C to 630°C.

Keywords: Aluminum nitride; pulsed laser deposition; optical reflectance; color purity frequency response; surface acoustic wave (search for similar items in EconPapers)
Date: 2013
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DOI: 10.1142/S0218625X13500170

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