STUDY ON THE PREPARATION OF DLC FILMS DEPOSITED ON SILVER NANOPARTICLES AND THE SENSITIVITY OF LSPR INTERFACE

Dan Zeng (), Nanyu Ma (), Yujie Huang (), Zhenyi Fei (), Musen Li (), Junwei Di () and Min Wang ()
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Dan Zeng: Key Laboratory for Liquid–Solid Structural Evolution, and Processing of Materials (Ministry of Education), Shandong University, Jinan 250061, P. R. China
Nanyu Ma: Key Laboratory for Liquid–Solid Structural Evolution, and Processing of Materials (Ministry of Education), Shandong University, Jinan 250061, P. R. China
Yujie Huang: Key Laboratory for Liquid–Solid Structural Evolution, and Processing of Materials (Ministry of Education), Shandong University, Jinan 250061, P. R. China
Zhenyi Fei: Key Laboratory for Liquid–Solid Structural Evolution, and Processing of Materials (Ministry of Education), Shandong University, Jinan 250061, P. R. China
Musen Li: Key Laboratory for Liquid–Solid Structural Evolution, and Processing of Materials (Ministry of Education), Shandong University, Jinan 250061, P. R. China
Junwei Di: College of Chemistry Chemical Engineering and Material Science, Soochow University, Suzhou 215123, P. R. China
Min Wang: Shandong University Industrial Group, Co. Ltd, South Shanda Road, Jinan 250100, P. R. China

Surface Review and Letters (SRL), 2013, vol. 20, issue 03n04, 1-8

Abstract: Diamond-like carbon (DLC) films were deposited on the surface of silver nanoparticles (NPs) using two different sets of technology parameters by radio-frequency magnetron arc plasma enhanced chemical vapor deposition (PECVD) in this paper. The probe profilometer, SEM, AFM, Raman spectroscopy, XPS and UV–vis spectrophotometer were used to characterize the film thickness, microstructure, composition and sensing performance. Results showed that the basic vacuum degree had a greater influence on the properties of DLC films than that of RF forward power. The LSPR interface prepared in short time had sensing performance, but the sensitivity decreased with the thickness of DLC films increase. DLC films of higher sp3bonds content can slow down the decline rate of the sensitivity caused by increasing of the film thickness.

Keywords: Diamond-like carbon film; silver nanoparticles; LSPR interface; sensitivity (search for similar items in EconPapers)
Date: 2013
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DOI: 10.1142/S0218625X13500248

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