NEW FABRICATION METHOD OF THREE-ELECTRODE SYSTEM ON CYLINDRICAL CAPILLARY SURFACE AS A FLEXIBLE IMPLANTABLE MICRONEEDLE

Zhuoqing Yang, Yi Zhang (), Toshihiro Itoh and Ryutaro Maeda
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Zhuoqing Yang: Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8564, Japan;
Yi Zhang: Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8564, Japan
Toshihiro Itoh: Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8564, Japan
Ryutaro Maeda: Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8564, Japan

Surface Review and Letters (SRL), 2013, vol. 20, issue 03n04, 1-8

Abstract: In this present paper, a three-electrode system has been fabricated and integrated on the cylindrical polymer capillary surface by micromachining technology, which could be used as a flexible and implantable microneedle for glucose sensor application in future. A UV lithography system is successfully developed for high resolution alignment on cylindrical substrates. The multilayer alignment exposure for cylindrical polymer capillary substrate is for the first time realized utilizing the lithography system. The ±1 μm alignment precision has been realized on the 330 μm-outer diameter polymer capillary surface, on which the three-electrode structure consisting of two platinum electrodes and oneAg/AgClreference electrode has been fabricated. The fabricated whole device as microneedle for glucose sensor application has been also characterized in 1 mol/LKCland 0.02 mol/LK3Fe(CN)6mix solution. The measured cyclic voltammetry curve shows that the prepared three-electrode system has a good redox property.

Keywords: Three-electrode; cylindrical surface; micromachining; multilayer alignment; microneedle (search for similar items in EconPapers)
Date: 2013
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DOI: 10.1142/S0218625X13500273

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