THE EFFECT OF THE GAS OUTLET ON THE GAS VELOCITY FIELD IN MASS-PRODUCTION OF HFCVD DIAMOND-COATED DRILLS

Bin Shen (), Lei Cheng () and Fanghong Sun ()
Additional contact information
Bin Shen: School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, P. R. China
Lei Cheng: Suzhou Jiao Zuan Superhard Nanocoatings Co., Ltd., Suzhou, Jiangsu Province, P. R. China
Fanghong Sun: School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, P. R. China

Surface Review and Letters (SRL), 2014, vol. 21, issue 04, 1-15

Abstract: In the present study, the finite volume method (FVM) is adopted to investigate the effect of gas outlet on the fluid field generated by a hot filament chemical vapor deposition (HFCVD) setup that is designed for the mass-production of diamond coated drills. The temperature field is calculated simultaneously such that its effect on the gas flow can be included in the resulted gas velocity field. First, the effect of outlet radius (Rout) is investigated using a 2-outlets arrangement. The results show that the gas field obtained withRout= 10mm is superior toRout= 5mm or 15 mm, which not only can produce higher gas velocity, but also a more uniform gas field in filament plane. To further refine the uniformity of gas field outside the filament area, four 4-outlets arrangements with different combinations of the distance between gas outlets and worktable and gas inlets coverage are proposed and a comparative study on their effect on the gas field is conducted. The simulation results show that allocating two additional outlets near the worktable is beneficial for enhancing the uniformity of gas velocity field outside the filaments but slightly worsen it near the filaments. Finally, actual deposition experiments are conducted to justify the simulation results and the results suggest that the gas velocity in the drill region plays critical role on the growth rate of diamond film and the 4-outlets arrangement could provide more uniform growth environment than the 2-outlets arrangement.

Keywords: Fluid field simulation; HFCVD; finite volume method; gas outlet arrangement; mass-production of diamond coated drills (search for similar items in EconPapers)
Date: 2014
References: Add references at CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X14500516
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:21:y:2014:i:04:n:s0218625x14500516

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X14500516

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().