TESTING OF NICKEL-CHROME ALLOY AS A TIP MATERIAL FOR MULTI-TIP LANGMUIR PROBES

Muhammad Yasin Naz, Shazia Shukrullah, Abdul Ghaffar, Imran Shakir, Sami Ullah and Muhammad Sagir
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Muhammad Yasin Naz: Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, 31750 Tronoh, Perak, Malaysia
Shazia Shukrullah: Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, 31750 Tronoh, Perak, Malaysia
Abdul Ghaffar: Department of Physics, University of Agriculture, 38040 Faisalabad, Pakistan
Imran Shakir: Deanship of Scientific Research, College of Engineering, King Saud University, 11451 Riyadh, Saudi Arabia
Sami Ullah: Department of Chemical Engineering, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, 31750 Tronoh, Perak, Malaysia
Muhammad Sagir: Department of Chemical Engineering, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, 31750 Tronoh, Perak, Malaysia

Surface Review and Letters (SRL), 2014, vol. 21, issue 04, 1-7

Abstract: The electrostatic probes are considered to be the most powerful and experimentally simplest technique for plasma characterization. The objective of the work was to test the nickel-chrome alloy as probe tip material for characterization of RF discharge plasmas. In order to meet the objective, a triple Langmuir probe diagnostic system and associated driving circuit was designed and tested in inductively coupled plasma (ICP) generated by a 13.56 MHz radio frequency (RF) source. Using this probe diagnostic, the electron temperature, electron number density and ion saturation current were measured as a function of input RF power and filling gas pressure. An increasing trend was noticed in electron temperature and electron number density with input power whilst a decreasing trend was evident in these parameters for increasing nitrogen gas pressure. The overall variations in electron temperature and electron number density after repeated measurements were ranging from 5% to 12% and 3% to 13%, respectively.

Keywords: Multi-tip probes; electron number density; electron temperature; radio frequency plasmas (search for similar items in EconPapers)
Date: 2014
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DOI: 10.1142/S0218625X14500565

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