ANALYTICAL MODELING OF SQUEEZE FILM DAMPING IN DUAL AXIS TORSION MICROACTUATORS

Hamid Moeenfard ()
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Hamid Moeenfard: Ferdowsi University of Mashhad, Khorasan Razavi, Iran

Surface Review and Letters (SRL), 2015, vol. 22, issue 01, 1-8

Abstract: In this paper, problem of squeeze film damping in dual axis torsion microactuators is modeled and closed form expressions are provided for damping torques around tilting axes of the actuator. The Reynolds equation which governs the pressure distribution underneath the actuator is linearized. The resulting equation is then solved analytically. The obtained pressure distribution is used to calculate the normalized damping torques around tilting axes of the actuator. Dependence of the damping torques on the design parameters of the dual axis torsion actuator is studied. It is observed that with proper selection of the actuator's aspect ratio, damping torque along one of the tilting directions can be eliminated. It is shown that when the tilting angles of the actuator are small, squeeze film damping would act like a linear viscous damping. The results of this paper can be used for accurate dynamical modeling and control of torsion dual axis microactuators.

Keywords: Dual axis torsion microactuator; squeeze film damping; Reynolds equation; analytical modeling; damping torque (search for similar items in EconPapers)
Date: 2015
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DOI: 10.1142/S0218625X15500067

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