CARBON ION IRRADIATION EFFECTS ON PULSED LASER DEPOSITED TITANIUM NITRIDE THIN FILMS

Khaliq Mahmood (), Shazia Bashir, Mahreen Akram, Asma Hayat, FAIZAN-Ul-HAQ and Shahzad Saadat
Additional contact information
Khaliq Mahmood: Centre for Advanced Studies in Physics (CASP), GC University Lahore, Pakistan
Shazia Bashir: Centre for Advanced Studies in Physics (CASP), GC University Lahore, Pakistan
Mahreen Akram: Centre for Advanced Studies in Physics (CASP), GC University Lahore, Pakistan
Asma Hayat: Centre for Advanced Studies in Physics (CASP), GC University Lahore, Pakistan
FAIZAN-Ul-HAQ: Centre for Advanced Studies in Physics (CASP), GC University Lahore, Pakistan
Shahzad Saadat: Centre for Advanced Studies in Physics (CASP), GC University Lahore, Pakistan

Surface Review and Letters (SRL), 2015, vol. 22, issue 02, 1-10

Abstract: Pulse laser deposited thin films of TiN are irradiated by 1 MeV carbon (C+) ions beam for various doses ranging 0.4 to 2.8 × 1014ions/cm2. Atomic force microscopy (AFM) analysis reveals the formation of hillocks like structures after ion irradiation. X-ray diffraction (XRD) investigations show that the film crystallinity increases for lower doses ranging from 0.4 to 1.2 × 1014ions/cm2and decreases for higher doses (2 to 2.8 × 1014ions/cm2) of ions. No new bands are identified from Raman spectroscopy. However, a noticeable change in microhardness has been observed. The hillock densities as well as hardness are strongly dependent upon ion dose.

Keywords: Pulsed laser deposition; titanium nitride; C+ion irradiation; nano hillocks; structural modification (search for similar items in EconPapers)
Date: 2015
References: View complete reference list from CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X15500201
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:22:y:2015:i:02:n:s0218625x15500201

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X15500201

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().