CHARACTERISTICS OFTiNiTHIN FILMS DEPOSITED BY MAGNETRON SPUTTERING SYSTEM WITH OPTICAL EMISSION SPECTROSCOPY MONITOR

Erqiang Liu, Mingdong Bao, Guozheng Yuan, Gesheng Xiao, Tao Jin, Zhigang Li and Xuefeng Shu ()
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Erqiang Liu: Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, P. R. China
Mingdong Bao: Institute of Materials Engineering, Ningbo University of Technology, Ningbo 315016, P. R. China
Guozheng Yuan: Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, P. R. China
Gesheng Xiao: Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, P. R. China
Tao Jin: Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, P. R. China
Zhigang Li: Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, P. R. China
Xuefeng Shu: Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, P. R. China

Surface Review and Letters (SRL), 2015, vol. 22, issue 05, 1-8

Abstract: TiNicomposite thin films were fabricated using a closed-field unbalanced magnetron sputtering system equipped with optical emission spectroscopy monitor (OEM). The thin films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and nanoindentation. Results show that theTiNifilms are amorphous, and their composition varies approximately linearly with the OEM value. Thus, the film composition could be controlled byin situreal-time OEM. The structure of the single B2 parent phase was observed in the annealedTiNifilm. The hardness and elastic modulus of the films increased because of the precipitation of theTi3Ni4phase in the single B2 parent phase.

Keywords: TiNithin film; optical mission spectroscopy monitor; microstructure; nanoindentation; mechanical property (search for similar items in EconPapers)
Date: 2015
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DOI: 10.1142/S0218625X15500638

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