EconPapers    
Economics at your fingertips  
 

EFFECT OF DEPOSITION TEMPERATURE ON THE PROPERTIES OF TIO2 THIN FILMS DEPOSITED BY MOCVD

Zaki S. Khalifa ()
Additional contact information
Zaki S. Khalifa: Department of Physics, Beni-Suef University, Beni-Suef 62111, Egypt

Surface Review and Letters (SRL), 2016, vol. 23, issue 02, 1-9

Abstract: Crystal structure, microstructure, and optical properties of TiO2 thin films deposited on quartz substrates by metal-organic chemical vapor deposition (MOCVD) in the temperature range from 250∘C to 450∘C have been studied. The crystal structure, thickness, microstructure, and optical properties have been carried out using X-ray diffraction (XRD), field emission scanning electron microscope (FESEM), atomic force microscope (AFM), and UV-visible transmittance spectroscopy, respectively. XRD patterns show that the obtained films are pure anatase. Simultaneously, the crystal size calculated using XRD peaks, and the grain size measured by AFM decrease with the increase in deposition temperature. Moreover, the texture of the films change and roughness decrease with the increase in deposition temperature. The spectrophotometric transmittance spectra have been used to calculate the refractive index, extinction coefficient, dielectric constant, optical energy gap, and porosity of the deposited films. While the refractive index and dielectric constant decrease with the increase of deposition temperature, the porosity shows the opposite.

Keywords: Titanium dioxide; transmittance; X-ray diffraction; atomic force microscopy; metal-organic chemical vapor deposition (search for similar items in EconPapers)
Date: 2016
References: Add references at CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X16500013
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:23:y:2016:i:02:n:s0218625x16500013

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X16500013

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().

 
Page updated 2025-03-20
Handle: RePEc:wsi:srlxxx:v:23:y:2016:i:02:n:s0218625x16500013