SURFACE FINISHING OF NANOSCRATCH PATTERNS ON COATED PYREX GLASSES USING MAF

Seoung Hwan Lee ()
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Seoung Hwan Lee: Department of Mechanical Engineering, Hanyang University, #1271 Sa 1-Dong, Ansan, Kyunggi-Do 425-791, South Korea

Surface Review and Letters (SRL), 2017, vol. 24, issue 04, 1-11

Abstract: We investigate a surface finishing scheme fitted for AFM scratched nanopatterns on a coated surface using magnetic abrasive finishing (MAF). First, nanoscale patterning was carried out on IZO-coated Pyrex glass, with a specially-designed AFM machining setup. After AFM machining, nonuniform surface features such as pile-ups are generated, and the final shapes are often more complicated for coated materials. For this reason, MAF was implemented for the nanoscale removal of pile-up/debris of coated materials and design of experiment (DOE) was utilized to obtain optimal process conditions for the finishing process.The process was monitored using acoustic emission (AE) for coating-substrate (glass) boundary detection, as well for monitoring the polishing status/depth. Experimental results indicate the viability of the proposed scheme as a nanoscale selective finishing technique for various material setups.

Keywords: MAF; nanofinishing; IZO coated pyrex glass; DOE; acoustic emission monitoring; coating boundary detection (search for similar items in EconPapers)
Date: 2017
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DOI: 10.1142/S0218625X17500433

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