CHARACTERIZATION OF RF MAGNETRON-SPUTTERED CrCuN AND CrNiN COATINGS BY NANOINDENTATION

Shuyong Tan, Xiaohui Liu, Xuhai Zhang, Feng Fang and Zhangzhong Wang
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Shuyong Tan: School of Materials Science and Engineering, Nanjing Institute of Technology, Nanjing, Jiangsu 211167, P. R. China†Jiangsu Key Laboratory of Advanced Structural, Materials and Application Technology, Nanjing Institute of Technology, Nanjing, Jiangsu 211167, P. R. China
Xiaohui Liu: School of Materials Science and Engineering, Nanjing Institute of Technology, Nanjing, Jiangsu 211167, P. R. China
Xuhai Zhang: #x2021;School of Materials Science and Engineering, Southeast University, Nanjing, Jiangsu 211189, P. R. China
Feng Fang: #x2021;School of Materials Science and Engineering, Southeast University, Nanjing, Jiangsu 211189, P. R. China
Zhangzhong Wang: School of Materials Science and Engineering, Nanjing Institute of Technology, Nanjing, Jiangsu 211167, P. R. China†Jiangsu Key Laboratory of Advanced Structural, Materials and Application Technology, Nanjing Institute of Technology, Nanjing, Jiangsu 211167, P. R. China

Surface Review and Letters (SRL), 2017, vol. 24, issue 07, 1-7

Abstract: RF magnetron-sputtered CrCuN coatings with ultra-low Cu content (0.53–2.1 at.%) were deposited using Cr97Cu3 target (at.%) by changing the substrate negative bias from 0V to −200V. The CrNiN coatings with different nickel contents (0, 2.92 and 8.79 at.%) were sputtered by different-component Cr–Ni alloy targets (Cr, Cr95Ni5 and Cr80Ni20, in at.%). The effect of bias and alloying element content on coating toughness was investigated by nanoindentation. The results show that all the coatings have unsatisfied toughness because of H/E*<0.1. With increasing bias, the toughness of CrN and CrCuN coatings improves basically due to grain refinement caused by high bias effect. Under the same bias, although CrCuN coatings have finer grains, their toughness is still lower than that of CrN coatings because of inadequate copper coverage degree as a result of ultra-low copper content. On the contrary, once there is an appropriate alloying element content of 2.92 at.% Ni, the toughness of CrNiN coatings increases with the nickel content due to relatively higher Ni coverage degree.

Keywords: CrCuN coatings; CrNiN coatings; substrate bias; alloying element content; toughness; coverage degree (search for similar items in EconPapers)
Date: 2017
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DOI: 10.1142/S0218625X17501037

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