EconPapers    
Economics at your fingertips  
 

ANALYSIS OF THE MATERIAL REMOVAL RATE IN MAGNETIC ABRASIVE FINISHING OF THIN FILM COATED PYREX GLASS

Hee Hwan Lee () and Seoung Hwan Lee
Additional contact information
Hee Hwan Lee: Department of Mechanical Engineering, Hanyang University, #1271 Sa 1-Dong, Ansan, Kyunggi-Do, 425-791, South Korea
Seoung Hwan Lee: Department of Mechanical Engineering, Hanyang University, #1271 Sa 1-Dong, Ansan, Kyunggi-Do, 425-791, South Korea

Surface Review and Letters (SRL), 2017, vol. 24, issue supp01, 1-9

Abstract: The material removal rate (MRR) during precision finishing/polishing is a key factor, which dictates the process performance. Moreover, the MRR or wear rate is closely related to the material/part reliability. For nanoscale patterning and/or planarization on nano-order thickness coatings, the prediction and in-process monitoring of the MRR is necessary, because the process is not characterizable due to size effects and material property/process condition variations as a result of the coating/substrate interactions. The purpose of this research was to develop a practical methodology for the prediction and in-process monitoring of MRR during nanoscale finishing of coated surfaces. Using a specially designed magnetic abrasive finishing (MAF) and acoustic emission (AE) monitoring setup, experiments were carried out on indium-zinc-oxide (IZO) coated Pyrex glasses. After a given polishing time interval, AFM indentation was conducted for each workpiece sample to measure the adhesion force variations of the coating layers (IZO), which are directly related to the MRR changes. The force variation and AE monitoring data were compared to the MRR calculated form the surface measurement (Nanoview) results. The experimental results demonstrate strong correlations between AFM indentation and MRR measurement data. In addition, the monitored AE signals show sensitivity of the material structure variations of the coating layer, as the polishing progresses.

Keywords: MRR; nanofinishing; magnetic abrasive finishing; IZO-coated Pyrex glass; AFM nanoindentation; acoustic emission (search for similar items in EconPapers)
Date: 2017
References: View complete reference list from CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X1850004X
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:24:y:2017:i:supp01:n:s0218625x1850004x

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X1850004X

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().

 
Page updated 2025-03-20
Handle: RePEc:wsi:srlxxx:v:24:y:2017:i:supp01:n:s0218625x1850004x