STRUCTURE AND PROPERTIES OF NONHYDROGEN GexC1−x FILMS PREPARED BY PLD

Yong Cheng, Guojun Huang, Yimin Lu, Yanlong Guo, Chaowei Mi and Haiyuan Cao
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Yong Cheng: Opto-Electronics Facility, Wuhan Mechanical College, Wuhan 430075, P. R. China
Guojun Huang: Opto-Electronics Facility, Wuhan Mechanical College, Wuhan 430075, P. R. China
Yimin Lu: Opto-Electronics Facility, Wuhan Mechanical College, Wuhan 430075, P. R. China
Yanlong Guo: Opto-Electronics Facility, Wuhan Mechanical College, Wuhan 430075, P. R. China
Chaowei Mi: Opto-Electronics Facility, Wuhan Mechanical College, Wuhan 430075, P. R. China
Haiyuan Cao: Opto-Electronics Facility, Wuhan Mechanical College, Wuhan 430075, P. R. China

Surface Review and Letters (SRL), 2018, vol. 25, issue 07, 1-7

Abstract: Nonhydrogen germanium carbide (GexC1−x) films were prepared by KrF pulsed lasers deposition (PLD), and the effects of different germanium contents on the microstructures, optical properties and adhesion properties of the GexC1−x films were studied. XRD measurements showed that the GexC1−x films with different germanium contents were of amorphous structure. XPS analysis showed that the C/Ge atomic ratios of GexC1−x films were close to those of corresponding targets. The intensity of Ge3d peak in the GexC1−x films increased and the intensity of C1s peak decreased with the increase of the germanium content. The GexC1−x films’ sp3C bond contents increased from 46.4% to 69.7%. Ellipsometry and infrared transmission spectral measurements showed that the refractive index of GexC1−x films increased from 2.5 to 3.5 at the wavelength of 1μm with the increase of germanium content. The extinction coefficient of GexC1−x film was of the order of 10−3 in the infrared band when the germanium content was less than 10at.%. The adhesion tests showed that the adhesion performances of GexC1−x films were better when the germanium content increased.

Keywords: Nonhydrogen germanium carbide; pulsed laser deposition; microstructure; optical properties; adhesion performance (search for similar items in EconPapers)
Date: 2018
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DOI: 10.1142/S0218625X19500185

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