INFLUENCE OF THE SUBSTRATE TEMPERATURE ON TiO2 THIN LAYERS DEPOSITED BY THE DIRECT CURRENT MAGNETRON SPUTTERING TECHNOLOGY
Radouane Graine,
Khouloud Bedoud,
Nadjette Sehab and
Djamel Zelmati
Additional contact information
Radouane Graine: Research Center in Industrial Technologies, CRTI, P.O. Box 64, Cheraga 16014, Algiers, Algeria
Khouloud Bedoud: Research Center in Industrial Technologies, CRTI, P.O. Box 64, Cheraga 16014, Algiers, Algeria
Nadjette Sehab: Research Center in Industrial Technologies, CRTI, P.O. Box 64, Cheraga 16014, Algiers, Algeria
Djamel Zelmati: Research Center in Industrial Technologies, CRTI, P.O. Box 64, Cheraga 16014, Algiers, Algeria
Surface Review and Letters (SRL), 2021, vol. 28, issue 02, 1-12
Abstract:
In this study, Anatase thin films of titanium dioxide (TiO2) are deposited by the Direct Current (DC) magnetron sputtering technique on glass substrate for future application in gas sensors. In our work, we focused and discussed the effect of various substrate temperatures 200∘C, 400∘C and 450∘C, and film thicknesses 142, 220 and 410nm, respectively, in order to study the structural and optical properties of the TiO2 thin films. The crystalline structure and optical properties of TiO2 nanoparticles were investigated using X-ray Diffraction (XRD), Scanning Electron Microscopy (SEM), Energy-Dispersive X-ray Spectroscopy (EDS), Atomic Force Microscopy (AFM), Raman spectroscopy and UV–visible spectroscopy. The formation of the Anatase TiO2 with Tetragonal crystal structure has been confirmed with XRD. UV–visible spectrophotometry characterization of the developed thin films showed that all the films had an optical transmission greater than 92% in the visible region. In addition, the obtained direct and indirect optical band gaps using the Tauc plot are 3.66, 3.34eV at 200∘C 3.74, 3.37eV at 400∘C and 3.71, 3.37eV at 450∘C, respectively. Forouhi–Bloomer (FB) physical model has been used to obtain the refractive index and extinction coefficient by fitting theoretical transmittance curves to experimental ones. The optical refractive index is found to vary from 2.350 for 200∘C, 2.1499 for 400∘C and 2.1420 for 450∘C. Moreover, we have obtained an extinction coefficient k (λ) of around 3.71×10−3 for both substrate temperatures 200∘C and 400∘C, and around 1.043×10−3 for the 450∘C.
Keywords: DC magnetron sputtering; TiO2 Anatase; nanoparticles; optical properties (search for similar items in EconPapers)
Date: 2021
References: Add references at CitEc
Citations:
Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X20500547
Access to full text is restricted to subscribers
Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.
Export reference: BibTeX
RIS (EndNote, ProCite, RefMan)
HTML/Text
Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:28:y:2021:i:02:n:s0218625x20500547
Ordering information: This journal article can be ordered from
DOI: 10.1142/S0218625X20500547
Access Statistics for this article
Surface Review and Letters (SRL) is currently edited by S Y Tong
More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().