SPUTTERING OF GOLD AND COPPER SURFACES UNDER LOW ENERGY CESIUM IONS

Uzair Ahmed, Mohsan Jelani, Najam Ul Hassan, Muhammad Naeem, Tahir Zaman and Shahbaz Ahmad
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Uzair Ahmed: Centre for Advanced Studies in Physics, Government College University Lahore 54000, Pakistan
Mohsan Jelani: ��Department of Physics, University of Kotli Azad Jammu and Kashmir 11100, Pakistan
Najam Ul Hassan: ��Department of Physics, University of Central Punjab, Sargodha 40100, Pakistan
Muhammad Naeem: �Department of Physics, Women University of Azad Jammu and Kashmir Bagh 12500, Pakistan
Tahir Zaman: �Department of Chemistry, University of Kotli Azad Jammu and Kashmir, Pakistan
Shahbaz Ahmad: Centre for Advanced Studies in Physics, Government College University Lahore 54000, Pakistan

Surface Review and Letters (SRL), 2022, vol. 29, issue 02, 1-11

Abstract: To use gold and copper ions for ion implantation through 1-MV pelletron accelerator, gold and copper targets were bombarded with low energy cesium ions applying source of negative ions by cesium sputtering (SNICS). This work aims to investigate the cluster dynamics of these noble metals in a low energy range so that optimized data can be obtained for the use of these cluster ions in ion implantation. Negative ions including monomers and clusters of both metals were detected which were mass analyzed. Cu clusters up to Cu4−1 and gold clusters up to Au7−1 were emitted. The minimum energy of cesium ions to produce enough cluster ions so that they could be detected by a mass analyzer has been determined. The data was analyzed to measure sputtering yield, total sputtering yield and normalized number density of different sputtered species. In this energy range, the sputtering behaviors of Cu remain almost constant but in the case of Au there is a slight increase in cluster sputtering probability with an increase in incident ion energy. The sputtering yield of clusters decreases according to the power-law, i.e. y(n)∠n−δ. Power law exponent in the case of copper has an average value of ∼2.3 whereas exponent in the case of gold clusters changes from 3.5 to 6.

Keywords: Au clusters; Cu clusters; Eth (Cs+); E (Cs+); sputtering yield; normalized number density (search for similar items in EconPapers)
Date: 2022
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DOI: 10.1142/S0218625X22500226

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