Numerical Solution of a Nonlinear Evolution Equation Describing Amorphous Surface Growth of Thin Films

Ronald H.W. Hoppe and Eva Nash
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Ronald H.W. Hoppe: University of Houston, Department of Mathematics
Eva Nash: Infineon Technologies AG

A chapter in Numerical Mathematics and Advanced Applications, 2004, pp 440-448 from Springer

Abstract: Summary We consider a nonlinear parabolic partial differential equation that describes the evolution of the surface morphology in the deposition of thin glassy films by molecular beam epitaxy. The dynamics of the growth process exhibits some unexpected initial linear behavior, before the nonlinear dynamics sets in. Therefore, for the numerical solution we suggest a combined spectral element/finite element approach. Results of numerical simulations are given that show a good agreement with experimental measurements.

Keywords: Nonlinear Evolution Equation; Posteriori Error Estimator; Thin Film Growth; Homogeneous Neumann Boundary Condition; Spectral Galerkin Method (search for similar items in EconPapers)
Date: 2004
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Persistent link: https://EconPapers.repec.org/RePEc:spr:sprchp:978-3-642-18775-9_41

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DOI: 10.1007/978-3-642-18775-9_41

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