A Novel Vehicle Pre-dispatching Method for Automated Material Handling System in Semiconductor Manufacturing

James T. Lin () and Chih-Wei Huang
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James T. Lin: National Tsing-Hua University
Chih-Wei Huang: National Tsing-Hua University

Chapter Chapter 86 in Proceedings of 2012 3rd International Asia Conference on Industrial Engineering and Management Innovation (IEMI2012), 2013, pp 861-872 from Springer

Abstract: Abstract As the demand for ultra-clean areas in semiconductor fabrication has increased, the need for more efficient automated material handling system (AMHS) has become imperative. A diffusion tool is characterized by its long processing time of 6–12h, thus making it a form-batch manufacturing step. Out of necessity with this application, wafer lots are temporarily stored in stocker and are delivered to diffusion tools for processing when the Work-In-Process (WIP) level reaches 4–6 lots. As a result, diffusion tools wait for long wafer delivery time due to the current vehicle assignment method, thus greatly impacting transportation and production efficiency. In order to improve the transport performance, a novel vehicle assignment method is proposed. Unlike the current methods, which assign idle vehicles to move to load ports sequentially, the novel vehicle pre-dispatching method calls several idle vehicles to move to a load port to simultaneously execute transport jobs with the goal of shortening a vehicle’s arrival time. To aid in our research, we performed simulation analysis of an AMHS for a diffusion area. The simulation outcome indicates that a substantial improvement in AMHS transport performance is achieved with applying of the vehicle pre-dispatching method.

Keywords: AMHS; Diffusion; Vehicle assignment; Simulation (search for similar items in EconPapers)
Date: 2013
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Persistent link: https://EconPapers.repec.org/RePEc:spr:sprchp:978-3-642-33012-4_86

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DOI: 10.1007/978-3-642-33012-4_86

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