A Simulation-Based Analysis of Cluster Tools Scheduling with Plant Simulation

Yan Min () and Xiao-rui Lin
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Yan Min: Guangdong University of Technology
Xiao-rui Lin: Guangdong University of Technology

Chapter Chapter 7 in The 19th International Conference on Industrial Engineering and Engineering Management, 2013, pp 71-80 from Springer

Abstract: Abstract Cluster tools are configurable and integrated equipment. They are widely used in semiconductor fabrication in recent years. It is difficult to effectively operate a cluster tools and schedule it due to wafer residency time constraints and activity time variation of cluster tools. The schedule effects on the time performance of cluster tools operation. In this paper, a simulation model based on Plant simulation is presented to discuss the schedule of cluster tools in steady state. This simulation model could describe and simulate the activities of robot, wafer processing and their corresponding timing of cluster tools operation. Hence, it is a useful method to analyze the time performance of cluster tools such as scheduling. Two examples are used to test the simulation model and show the proposed application of the simulation model.

Keywords: Cluster tools; Modeling; Plant simulation; Production scheduling; Semiconductor fabrication; Simulation (search for similar items in EconPapers)
Date: 2013
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Persistent link: https://EconPapers.repec.org/RePEc:spr:sprchp:978-3-642-37270-4_7

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DOI: 10.1007/978-3-642-37270-4_7

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