Simulation-Based Evolution Algorithm for Automated Material Handling System in a Semiconductor Fabrication Plant

James T. Lin () and Chao-Jung Huang
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James T. Lin: National Tsing Hua University
Chao-Jung Huang: National Tsing Hua University

A chapter in Proceedings of 2013 4th International Asia Conference on Industrial Engineering and Management Innovation (IEMI2013), 2014, pp 1035-1046 from Springer

Abstract: Abstract The automated material handling system (AMHS) in semiconductor industry plays a vital role in reducing wafer cycle times and enhancing fabrication plant productivity. Vehicle allocation for the AMHS is a challenging task because of the complexity of the manufacturing process and the stochasticity introduced by the inherent variability of processing times. This situation is observed especially in 300 mm wafer fabrication plants where the AMHS comprises both interbay and intrabay systems that perform the timely deliveries. To address this issue, we use the optimal computing budget allocation (OCBA) and extend it by adding genetic algorithm (GA). Under this combined approached, the number of iterations of each alternative is determined by OCBA, and then the optimal solution in the domain of feasible solutions is found through GA. This research provides a useful reference for both scholars and practitioners seeking optimal allocation of lithographical resources and number of iterations using random parameters.

Keywords: AMHS; GA; OCBA (search for similar items in EconPapers)
Date: 2014
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Persistent link: https://EconPapers.repec.org/RePEc:spr:sprchp:978-3-642-40060-5_99

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DOI: 10.1007/978-3-642-40060-5_99

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