Statistical Process Control for Semiconductor Manufacturing Processes

Masanobu Higashide, Ken Nishina, Hironobu Kawamura and Naru Ishii
Additional contact information
Masanobu Higashide: NEC Electronics Corp
Ken Nishina: Nagoya Institute of Technology
Hironobu Kawamura: Nagoya Institute of Technology
Naru Ishii: Nagoya Institute of Technology

A chapter in Frontiers in Statistical Quality Control 9, 2010, pp 71-84 from Springer

Abstract: Summary This paper considers statistical process control (SPC) for the semiconductor manufacuturing industry, where automatic process adjustment and process maintenance are widely used. However, SPC has been developed in parts industry an, thus, application of SPC to chemical processes such as those in the semiconductor manufacuturinghas not been systematically investigated Two case studies are presented; one is an example for process adjustment and the other is an example for process maintenance. Either of them is based on control charts and it is discussed how to take into account process autocorrelation.

Keywords: Control Chart; Process Adjustment; Statistical Process Control; Principal Component Score; Correction Formula (search for similar items in EconPapers)
Date: 2010
References: Add references at CitEc
Citations:

There are no downloads for this item, see the EconPapers FAQ for hints about obtaining it.

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:spr:sprchp:978-3-7908-2380-6_5

Ordering information: This item can be ordered from
http://www.springer.com/9783790823806

DOI: 10.1007/978-3-7908-2380-6_5

Access Statistics for this chapter

More chapters in Springer Books from Springer
Bibliographic data for series maintained by Sonal Shukla () and Springer Nature Abstracting and Indexing ().