Optimal Design of Axial Field Silicon Micromotor by Use of Field/Circuit Models

Sławomir Wiak ()
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Sławomir Wiak: Academy of Humanities and Economics in Lodz, Department of Artificial Intelligence and Informatic Systems

A chapter in Optimization and Inverse Problems in Electromagnetism, 2003, pp 151-159 from Springer

Abstract: Abstract The paper deals with the problems of field and circuit modeling of silicon disc-type micromotors. 3-D motor structure is proposed to be studied. The field analysis and torque calculation results have given the knowledge about the changes of the motor structure in order to increase unit motor torque. Comparative analysis leads to the choice of optimal design of the structure.

Keywords: Rotor Electrode; Stator Electrode; Polysilicon Layer; Hard Mask; Rotor Tooth (search for similar items in EconPapers)
Date: 2003
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Persistent link: https://EconPapers.repec.org/RePEc:spr:sprchp:978-94-017-2494-4_16

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DOI: 10.1007/978-94-017-2494-4_16

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