The controllable deposition of large area roll-to-roll sputtered ito thin films for photovoltaic applications

Yasemin Demirhan, Hasan Koseoglu, Fulya Turkoglu, Zemzem Uyanik, Mehtap Ozdemir, Gulnur Aygun and Lutfi Ozyuzer

Renewable Energy, 2020, vol. 146, issue C, 1549-1559

Abstract: In the present study, using a large area roll-to-roll DC magnetron sputtering system deposition of ITO thin films on polyethylene terephthalate (PET) substrates were achieved. In order to investigate the effect of growth conditions on the film properties all through the deposition process, optical emission spectroscopy (OES) analysis have been accomplished in a governable way. The consequences of Oxygen partial pressure and film thickness on electrical, and optical properties of the films were determined. It was shown that the intensity of optical emission peaks are subjected to the discharge power and as well as the O2/Ar flow ratio. Large area, uniform ITO films with relatively high transparency and low electrical resistivity (Rs˂50 Ω/sqr) were succesfully deposited on PET substrates. The significance of both the figure of merit (FOM) and the optical band gap values on the performance of different TCO thin films were addressed. In this work, the obtained results suggest that the overall performance is sufficient to implement the ITO films in photovoltaic and OLED applications.

Keywords: Transparent conducting oxides (TCO); ITO thin films; Large area roll to roll sputtering; Optical emission spectroscopy; Flexible electrodes for photovoltaics (search for similar items in EconPapers)
Date: 2020
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Persistent link: https://EconPapers.repec.org/RePEc:eee:renene:v:146:y:2020:i:c:p:1549-1559

DOI: 10.1016/j.renene.2019.07.038

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