Lyapunov-Based Controller Using Nonlinear Observer for Planar Motors

Khac Huan Su, Jaeyun Yim, Wonhee Kim and Youngwoo Lee
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Khac Huan Su: Department of Electrical Engineering, Chonnam National University, Gwangju 61186, Korea
Jaeyun Yim: Department of Energy System Engineering, Chung-Ang University, Seoul 06974, Korea
Wonhee Kim: School of Energy System Engineering, Chung-Ang University, Seoul 06974, Korea
Youngwoo Lee: Department of Electrical Engineering, Chonnam National University, Gwangju 61186, Korea

Mathematics, 2022, vol. 10, issue 13, 1-18

Abstract: In general, it is not easy work to design controllers and observers for high-order nonlinear systems. Planar motors that are applied to semiconductor wafer-stage processes have 14th-order nonlinear dynamics and require high resolution for position tracking. Thus, many sensors are required to achieve enhanced tracking performance because there are many state variables. To handle these problems, we developed a Lyapunov-based controller to improve the position tracking performance. Consequently, a nonlinear observer (NOB) was also developed to estimate all of the state variables including the position, the velocity, and the phase current using only position feedback. The closed-loop stability is proved through Lyapunov theory and the input-to-state stability (ISS) property. The proposed method was evaluated based on the simulation results and compared with the conventional proportional–integral–derivative (PID) control method to show the improvement in the position tracking performance.

Keywords: planar motors; feedback linearization; position control; Lyapunov methods; nonlinear observer (search for similar items in EconPapers)
JEL-codes: C (search for similar items in EconPapers)
Date: 2022
References: View references in EconPapers View complete reference list from CitEc
Citations: View citations in EconPapers (1)

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