Flexible temperature-pressure dual sensor based on 3D spiral thermoelectric Bi2Te3 films

Hailong Yu, Zhenqing Hu, Juan He, Yijun Ran, Yang Zhao, Zhi Yu () and Kaiping Tai ()
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Hailong Yu: University of Science and Technology of China
Zhenqing Hu: University of Science and Technology of China
Juan He: University of Science and Technology of China
Yijun Ran: University of Science and Technology of China
Yang Zhao: Institute of Metal Research, Chinese Academy of Sciences
Zhi Yu: University of Science and Technology of China
Kaiping Tai: University of Science and Technology of China

Nature Communications, 2024, vol. 15, issue 1, 1-9

Abstract: Abstract Dual-parameter pressure-temperature sensors are widely employed in personal health monitoring and robots to detect external signals. Herein, we develop a flexible composite dual-parameter pressure-temperature sensor based on three-dimensional (3D) spiral thermoelectric Bi2Te3 films. The film has a (000l) texture and good flexibility, exhibiting a maximum Seebeck coefficient of −181 μV K–1 and piezoresistance gauge factor of approximately −9.2. The device demonstrates a record-high temperature-sensing performance with a high sensing sensitivity (−426.4 μV K−1) and rapid response time (~0.95 s), which are better than those observed in most previous studies. In addition, owing to the piezoresistive effect in the Bi2Te3 film, the 3D-spiral deviceexhibits significant pressure-response properties with a pressure-sensing sensitivity of 120 Pa–1. This innovative approach achieves high-performance dual-parameter sensing using one kind of material with high flexibility, providing insight into the design and fabrication of many applications, such as e-skin.

Date: 2024
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DOI: 10.1038/s41467-024-46836-1

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