Crosslinking-induced patterning of MOFs by direct photo- and electron-beam lithography

Xiaoli Tian, Fu Li, Zhenyuan Tang, Song Wang, Kangkang Weng, Dan Liu, Shaoyong Lu, Wangyu Liu, Zhong Fu, Wenjun Li, Hengwei Qiu, Min Tu, Hao Zhang () and Jinghong Li
Additional contact information
Xiaoli Tian: Tsinghua University
Fu Li: Tsinghua University
Zhenyuan Tang: Chinese Academy of Sciences
Song Wang: Tsinghua University
Kangkang Weng: Tsinghua University
Dan Liu: Tsinghua University
Shaoyong Lu: Tsinghua University
Wangyu Liu: Tsinghua University
Zhong Fu: Tsinghua University
Wenjun Li: Tsinghua University
Hengwei Qiu: Tsinghua University
Min Tu: Chinese Academy of Sciences
Hao Zhang: Tsinghua University
Jinghong Li: Tsinghua University

Nature Communications, 2024, vol. 15, issue 1, 1-15

Abstract: Abstract Metal-organic frameworks (MOFs) with diverse chemistry, structures, and properties have emerged as appealing materials for miniaturized solid-state devices. The incorporation of MOF films in these devices, such as the integrated microelectronics and nanophotonics, requires robust patterning methods. However, existing MOF patterning methods suffer from some combinations of limited material adaptability, compromised patterning resolution and scalability, and degraded properties. Here we report a universal, crosslinking-induced patterning approach for various MOFs, termed as CLIP-MOF. Via resist-free, direct photo- and electron-beam (e-beam) lithography, the ligand crosslinking chemistry leads to drastically reduced solubility of colloidal MOFs, permitting selective removal of unexposed MOF films with developer solvents. This enables scalable, micro-/nanoscale (≈70 nm resolution), and multimaterial patterning of MOFs on large-area, rigid or flexible substrates. Patterned MOF films preserve their crystallinity, porosity, and other properties tailored for targeted applications, such as diffractive gas sensors and electrochromic pixels. The combined features of CLIP-MOF create more possibilities in the system-level integration of MOFs in various electronic, photonic, and biomedical devices.

Date: 2024
References: View references in EconPapers View complete reference list from CitEc
Citations:

Downloads: (external link)
https://www.nature.com/articles/s41467-024-47293-6 Abstract (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-47293-6

Ordering information: This journal article can be ordered from
https://www.nature.com/ncomms/

DOI: 10.1038/s41467-024-47293-6

Access Statistics for this article

Nature Communications is currently edited by Nathalie Le Bot, Enda Bergin and Fiona Gillespie

More articles in Nature Communications from Nature
Bibliographic data for series maintained by Sonal Shukla () and Springer Nature Abstracting and Indexing ().