Imaging 3D chemistry at 1 nm resolution with fused multi-modal electron tomography

Jonathan Schwartz, Zichao Wendy Di, Yi Jiang, Jason Manassa, Jacob Pietryga, Yiwen Qian, Min Gee Cho, Jonathan L. Rowell, Huihuo Zheng, Richard D. Robinson, Junsi Gu, Alexey Kirilin, Steve Rozeveld, Peter Ercius, Jeffrey A. Fessler, Ting Xu, Mary Scott () and Robert Hovden ()
Additional contact information
Jonathan Schwartz: University of Michigan
Zichao Wendy Di: Argonne National Laboratory
Yi Jiang: Argonne National Laboratory
Jason Manassa: University of Michigan
Jacob Pietryga: University of Michigan
Yiwen Qian: University of California at Berkeley
Min Gee Cho: University of California at Berkeley
Jonathan L. Rowell: Cornell University
Huihuo Zheng: Argonne National Laboratory
Richard D. Robinson: Cornell University
Junsi Gu: Dow Chemical Co.
Alexey Kirilin: Dow Chemical Co.
Steve Rozeveld: Dow Chemical Co.
Peter Ercius: Lawrence Berkeley National Laboratory
Jeffrey A. Fessler: University of Michigan
Ting Xu: University of California at Berkeley
Mary Scott: University of California at Berkeley
Robert Hovden: University of Michigan

Nature Communications, 2024, vol. 15, issue 1, 1-10

Abstract: Abstract Measuring the three-dimensional (3D) distribution of chemistry in nanoscale matter is a longstanding challenge for metrological science. The inelastic scattering events required for 3D chemical imaging are too rare, requiring high beam exposure that destroys the specimen before an experiment is completed. Even larger doses are required to achieve high resolution. Thus, chemical mapping in 3D has been unachievable except at lower resolution with the most radiation-hard materials. Here, high-resolution 3D chemical imaging is achieved near or below one-nanometer resolution in an Au-Fe3O4 metamaterial within an organic ligand matrix, Co3O4-Mn3O4 core-shell nanocrystals, and ZnS-Cu0.64S0.36 nanomaterial using fused multi-modal electron tomography. Multi-modal data fusion enables high-resolution chemical tomography often with 99% less dose by linking information encoded within both elastic (HAADF) and inelastic (EDX/EELS) signals. We thus demonstrate that sub-nanometer 3D resolution of chemistry is measurable for a broad class of geometrically and compositionally complex materials.

Date: 2024
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DOI: 10.1038/s41467-024-47558-0

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