High piezoelectric property with exceptional stability in self-poled ferroelectric films

Lisha Liu (), Jiaojiao Yi (), Kun Xu, Zhen Liu, Mingmeng Tang, Le Dai, Xuan Gao, Yang Liu, Shuhao Wang, Zhang Zhang, Liang Shu, Jing-Feng Li, Shujun Zhang () and Yaojin Wang ()
Additional contact information
Lisha Liu: Nanjing
Jiaojiao Yi: Jiangsu University of Technology
Kun Xu: Stanford University
Zhen Liu: Nanjing
Mingmeng Tang: Nanjing
Le Dai: Nanjing
Xuan Gao: Nanjing
Yang Liu: Nanjing
Shuhao Wang: Nanjing
Zhang Zhang: Nanjing
Liang Shu: Tsinghua University
Jing-Feng Li: Tsinghua University
Shujun Zhang: University of Wollongong
Yaojin Wang: Nanjing

Nature Communications, 2024, vol. 15, issue 1, 1-10

Abstract: Abstract Ferroelectric films are highly sought-after in micro-electro-mechanical systems, particularly with the trend towards miniaturization. However, their tendency to depolarize and degradation in piezoelectric properties when exposed to packaging procedures at temperatures exceeding 260 °C remains a significant challenge. Here, we reveal the prerequisites for self-poling and leverage these insights to achieve unprecedented macroscopic performance through a two-step approach involving texture construction and hierarchical heterogeneity engineering. The significant [001] texture and fine Zr/Ti heterogeneity, facilitated by a PbO-TiO2 buffer, enable a piezoelectric charge coefficient of 550 pC/N in self-poled Pb(Zr0.52Ti0.48)O3 film. This material demonstrates impressive resilience to elevated temperatures up to 300 °C, experiencing less than a 16% degradation in performance. Our approach can be extended to other ferroelectric systems, offering an innovative solution for high-temperature packaging and harsh environments in practical electro-mechanical applications.

Date: 2024
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DOI: 10.1038/s41467-024-54707-y

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