Chip-scale sensor for spectroscopic metrology

Chunhui Yao, Wanlu Zhang, Peng Bao, Jie Ma, Wei Zhuo, Minjia Chen, Zhitian Shi, Jingwen Zhou, Yuxiao Ye, Liang Ming, Ting Yan, Richard Penty and Qixiang Cheng ()
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Chunhui Yao: University of Cambridge
Wanlu Zhang: University of Cambridge
Peng Bao: University of Cambridge
Jie Ma: GlitterinTech Limited
Wei Zhuo: GlitterinTech Limited
Minjia Chen: University of Cambridge
Zhitian Shi: University of Cambridge
Jingwen Zhou: GlitterinTech Limited
Yuxiao Ye: GlitterinTech Limited
Liang Ming: GlitterinTech Limited
Ting Yan: GlitterinTech Limited
Richard Penty: University of Cambridge
Qixiang Cheng: University of Cambridge

Nature Communications, 2024, vol. 15, issue 1, 1-11

Abstract: Abstract Miniaturized spectrometers hold great promise for in situ, in vitro, and even in vivo sensing applications. However, their size reduction imposes vital performance constraints in meeting the rigorous demands of spectroscopy, including fine resolution, high accuracy, and ultra-wide observation window. The prevailing view in the community holds that miniaturized spectrometers are most suitable for coarse identification of signature peaks. Here, we present an integrated reconstructive spectrometer that enables near-infrared (NIR) spectroscopic metrology, and demonstrate a fully packaged sensor with auxiliary electronics. Such a sensor operates over a 520 nm bandwidth together with a resolution below 8 pm, yielding a record-breaking bandwidth-to-resolution ratio of over 65,000. The classification of different types of solid substances and the concentration measurement of aqueous and organic solutions are performed, all achieving approximately 100% accuracy. Notably, the detection limit of our sensor matches that of commercial benchtop counterparts, which is as low as 0.1% (i.e. 100 mg/dL) for identifying the concentration of glucose solution.

Date: 2024
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DOI: 10.1038/s41467-024-54708-x

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