Technology for the Accurate Preparation of Silicon Capacitive Pressure Sensors with Biomedical Application

Florin Gaiseanu
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Florin Gaiseanu: Science and Technology of Information Bucharest (Romania) and Barcelona, Spain

Biomedical Journal of Scientific & Technical Research, 2022, vol. 42, issue 4, 33790-33796

Abstract: The boron diffusion in silicon from oxidation-assisted BBr3 and B2O3 diffusion sources is an effective technique...

Keywords: Journal on Medical Science; Medical Journal in USA; Journals on Medical Research; Journals on Biomedical Science; Journals on Biomedical Imaging; Biomedical Journal Articles; Journal of Biomedical Research and Review; Biomedical Science Articles; Journals on Biomedical Imaging; Journals on Medical Drug and Therapeutics (search for similar items in EconPapers)
Date: 2022
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Persistent link: https://EconPapers.repec.org/RePEc:abf:journl:v:42:y:2022:i:4:p:33790-33796

DOI: 10.26717/BJSTR.2022.42.006777

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