Design, Structural and Electrostatic Analysis of Three MEMS Micro Accelerometers

Jose Luis Gonzalez Vidal, Jose Luis Calderon Osorno, Edmundo Rene Duran Camarillo and Silvestre Ascencion Garcia Sanchez
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Jose Luis Gonzalez Vidal: Universidad Autonoma del Estado de Hidalgo, Mexico.
Jose Luis Calderon Osorno: Instituto Politecnico Nacional, UPIIH, Hidalgo, Mexico.
Edmundo Rene Duran Camarillo: Instituto Politecnico Nacional, ESCOM, Mexico.
Silvestre Ascencion Garcia Sanchez: Instituto Politecnico Nacional, UPIIH, Mexico.

European Journal of Electrical Engineering and Computer Science, 2019, vol. 3, issue 6

Abstract: Three low-power MEMS micro-accelerometers were designed, the first with variable distance and the last with variable area. Then, electrostatic analysis and simulation by the finite element method was performed to show its behavior and performance. In the simulation and analysis the software COMSOL MULTIPHYSICS 5.1 was used. The results show that the variable area micro-accelerometer exhibits the best relationship between behavior and performance.

Keywords: Inertial sensor; MEMS; mesh; micro-accelerometer. (search for similar items in EconPapers)
Date: 2019
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Persistent link: https://EconPapers.repec.org/RePEc:epw:ejece0:v:3:y:2019:i:6:id:19149

DOI: 10.24018/ejece.2019.3.6.149

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