High-resolution combinatorial patterning of functional nanoparticles

Xing Xing, Zaiqin Man, Jie Bian, Yadong Yin (), Weihua Zhang () and Zhenda Lu ()
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Xing Xing: Nanjing University
Zaiqin Man: Nanjing University
Jie Bian: Nanjing University
Yadong Yin: University of California
Weihua Zhang: Nanjing University
Zhenda Lu: Nanjing University

Nature Communications, 2020, vol. 11, issue 1, 1-8

Abstract: Abstract Fast, low-cost, reliable, and multi-component nanopatterning techniques for functional colloidal nanoparticles have been dreamed about by scientists and engineers for decades. Although countless efforts have been made, it is still a daunting challenge to organize different nanocomponents into a predefined structure with nanometer precision over the millimeter and even larger scale. To meet the challenge, we report a nanoprinting technique that can print various functional colloidal nanoparticles into arbitrarily defined patterns with a 200 nm (or smaller) pitch (>125,000 DPI), 30 nm (or larger) pixel size/linewidth, 10 nm position accuracy and 50 nm overlay precision. The nanopatterning technique combines dielectrophoretic enrichment and deep surface-energy modulation and therefore features high efficiency and robustness. It can form nanostructures over the millimeter-scale by simply spinning, brushing or dip coating colloidal nanoink onto a substrate with minimum error (error ratio

Date: 2020
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DOI: 10.1038/s41467-020-19771-0

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