Ultrahigh-power-density flexible piezoelectric energy harvester based on freestanding ferroelectric oxide thin films

Zhongqi Ren, Shiqing Deng, Junda Shao, Yangyang Si, Chao Zhou, Jingjing Luo, Tao Wang, Jinyang Li, Jingxuan Li, Haipeng Liu, Xue Qi, Peike Wang, Ao Yin, Lijun Wu, Suzhu Yu, Yimei Zhu, Jun Chen, Sujit Das, Jun Wei () and Zuhuang Chen ()
Additional contact information
Zhongqi Ren: Harbin Institute of Technology (Shenzhen)
Shiqing Deng: University of Science and Technology Beijing
Junda Shao: Harbin Institute of Technology (Shenzhen)
Yangyang Si: Harbin Institute of Technology (Shenzhen)
Chao Zhou: Harbin Institute of Technology (Shenzhen)
Jingjing Luo: Harbin Institute of Technology (Shenzhen)
Tao Wang: Harbin Institute of Technology (Shenzhen)
Jinyang Li: Harbin Institute of Technology (Shenzhen)
Jingxuan Li: Harbin Institute of Technology (Shenzhen)
Haipeng Liu: Harbin Institute of Technology (Shenzhen)
Xue Qi: Harbin Institute of Technology (Shenzhen)
Peike Wang: Harbin Institute of Technology (Shenzhen)
Ao Yin: Harbin Institute of Technology (Shenzhen)
Lijun Wu: Brookhaven National Laboratory
Suzhu Yu: Harbin Institute of Technology (Shenzhen)
Yimei Zhu: Brookhaven National Laboratory
Jun Chen: University of Science and Technology Beijing
Sujit Das: Indian Institute of Science
Jun Wei: Harbin Institute of Technology (Shenzhen)
Zuhuang Chen: Harbin Institute of Technology (Shenzhen)

Nature Communications, 2025, vol. 16, issue 1, 1-11

Abstract: Abstract Flexible piezoelectric nanogenerators are emerging as a promising solution for powering next-generation flexible electronics by converting mechanical energy into electrical energy. However, traditional ferroelectric ceramics, despite their excellent piezoelectric properties, lack flexibility; while piezoelectric polymers, although highly flexible, have low piezoelectricity. The quest to develop materials that combine high piezoelectricity with exceptional flexibility has thus become a research focus. Herein, we present a breakthrough in this field with the fabrication of freestanding (111)-oriented PbZr0.52Ti0.48O3 single crystalline thin films, which exhibit remarkable flexibility and a high converse piezoelectric coefficient (~585 pm/V). This is achieved through water-soluble sacrificial layer to relieve substrate clamping and controlling the crystal orientation to further enhance the piezoelectric response. Our nanogenerators, constructed using these freestanding nanoscale membranes, demonstrate a record-high output power density (~63.5 mW/cm3), excellent flexibility (with a strain tolerance >3.4%), and superior mechanical stability in cycling tests (>60,000 cycles). These advancements pave the way for high-performance, flexible electronic devices utilizing ferroelectric oxide thin films.

Date: 2025
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DOI: 10.1038/s41467-025-58386-1

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