Silicon nano-kirigami with controlled plastic, elastic and hysteretic deformations

Qinghua Liang, Zhiguang Liu, Yu Han, Shang Chen, Haozhe Sun, Yingying Chen, Yongyue Zhang, Meihua Niu, Chongrui Li, Yang Wang, Ke Jin, Yongtian Wang, Yugui Yao, Juan Liu and Jiafang Li ()
Additional contact information
Qinghua Liang: State Key Laboratory of Chips and Systems for Advanced Light Field Display, Beijing Institute of Technology, School of Physics
Zhiguang Liu: University of Science and Technology of China
Yu Han: Beijing Institute of Technology
Shang Chen: Beijing Institute of Technology
Haozhe Sun: State Key Laboratory of Chips and Systems for Advanced Light Field Display, Beijing Institute of Technology, School of Physics
Yingying Chen: State Key Laboratory of Chips and Systems for Advanced Light Field Display, Beijing Institute of Technology, School of Physics
Yongyue Zhang: State Key Laboratory of Chips and Systems for Advanced Light Field Display, Beijing Institute of Technology, School of Physics
Meihua Niu: State Key Laboratory of Chips and Systems for Advanced Light Field Display, Beijing Institute of Technology, School of Physics
Chongrui Li: State Key Laboratory of Chips and Systems for Advanced Light Field Display, Beijing Institute of Technology, School of Physics
Yang Wang: State Key Laboratory of Chips and Systems for Advanced Light Field Display, Beijing Institute of Technology, School of Physics
Ke Jin: Beijing Institute of Technology
Yongtian Wang: Beijing Institute of Technology
Yugui Yao: State Key Laboratory of Chips and Systems for Advanced Light Field Display, Beijing Institute of Technology, School of Physics
Juan Liu: Beijing Institute of Technology
Jiafang Li: State Key Laboratory of Chips and Systems for Advanced Light Field Display, Beijing Institute of Technology, School of Physics

Nature Communications, 2025, vol. 16, issue 1, 1-11

Abstract: Abstract Nano-kirigami, inspired by the art of paper cutting and folding, offers a promising approach to three-dimensional (3D) nanomanufacturing by simply transforming two-dimensional (2D) precursors into complex 3D architectures. Here we report a profound study on three types of deformation behaviors of silicon-based nano-kirigami structures, including plastic, elastic, and hysteretic deformations. Three-stage bidirectional plastic deformations with double reversals, driven by ion-induced stress gradients, are observed and well explained by developing a torque model, revealing the critical stress competition caused by ion implantation and vacancy distribution during gallium ion irradiations. Fast-recovering elastic deformations are generated under mechanical or electrical stimuli, which can support mechanical response at a 10 nano-Newton level and optical modulation with high repeatability. Extraordinary hysteretic deformations with fast-changing and long-tail recovery periods are observed, which are uncovered by a capacitor-like charge accumulation mechanism. The controllable elastic and hysteretic deformation modes are further employed to demonstrate the applications in dynamic optical information encryption. This work reports a useful methodology to design, fabricate, and manipulate silicon-based nano-kirigami structures with great potential for applications in micro-electromechanical systems (MEMS), nano-opto-electromechanical systems (NOEMS), micro-/nano-machinery and other advanced nanotechnologies.

Date: 2025
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DOI: 10.1038/s41467-025-61405-w

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