Precision aerosol-jet micropatterning of liquid metal for high-performance flexible strain sensors

Benyan Xu, Mingyang Yang, Wenjun Cheng, Xuyin Li, Ximei Xu, Wenming Li, Hao Zhang and Ming Zhou ()
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Benyan Xu: Tsinghua University
Mingyang Yang: Tsinghua University
Wenjun Cheng: Tsinghua University
Xuyin Li: Tsinghua University
Ximei Xu: Tsinghua University
Wenming Li: Tsinghua University
Hao Zhang: Tsinghua University
Ming Zhou: Tsinghua University

Nature Communications, 2025, vol. 16, issue 1, 1-12

Abstract: Abstract Flexible wearable strain sensors are rapidly advancing non-invasive devices, while achieving both an ultra-low detection limit and wide sensing range concurrently presents a challenge. Herein, we propose a liquid metal (LM) strain sensors manufacturing strategy employing aerosol jet printing (AJP). Specially formulated LM ink is the key to enabling high-precision printing (12 μm) of LM via AJP, which is optimized by adjusting the concentration of polyvinylpyrrolidone and diethylene glycol. Additionally, through structured sensor pattern design in conjunction with narrow line width AJP, flexible LM strain sensors are developed that feature an ultralow detection limit (0.1% for l-sinusoid and 0.0033% for s wave LM strain sensors) combined with a wide sensing range (660% for l-sinusoid and 230% for s wave). Exceptional performance achieves comprehensive detection of human movement. This research reconciles the trade-off between detection limit and sensing range, while high-precision LM Aerosol-jet Micro-patterning enhances manufacturing in flexible electronics.

Date: 2025
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DOI: 10.1038/s41467-025-63023-y

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