A bioinspired permeable junction approach for sustainable device microfabrication

Chuanwang Yang (), Pengju Li, Chen Wei, Aleksander Prominski, Jingcheng Ma, Changxu Sun, Jiping Yue, Zhe Cheng, Jing Zhang, Brennan Ashwood, Wen Li, Jiuyun Shi, Kun Hou, Fengyuan Shi, Philip Griffin, Lihua Jin () and Bozhi Tian ()
Additional contact information
Chuanwang Yang: University of Chicago
Pengju Li: University of Chicago
Chen Wei: University of California, Los Angeles
Aleksander Prominski: University of Chicago
Jingcheng Ma: University of Chicago
Changxu Sun: University of Chicago
Jiping Yue: University of Chicago
Zhe Cheng: University of Chicago
Jing Zhang: University of Chicago
Brennan Ashwood: University of Chicago
Wen Li: University of Chicago
Jiuyun Shi: University of Chicago
Kun Hou: University of Chicago
Fengyuan Shi: University of Illinois Chicago
Philip Griffin: University of Chicago
Lihua Jin: University of California, Los Angeles
Bozhi Tian: University of Chicago

Nature Sustainability, 2024, vol. 7, issue 9, 1190-1203

Abstract: Abstract Microfabrication, the process of fabricating small structures usually in micrometre scale, has wide practical applications but confronts sustainability challenges due to the substantial chemical and energy consumption during the patterning and transfer stages. Here we introduce a bioinspired permeable junction approach involving patterning on biopolymer matrices with a salt-assisted photochemical synthesis to advance sustainable microfabrication. This approach leverages an ‘actuator-inhibitor-neutralizer’ process for on-demand adhesion and delamination. Utilizing water as a green actuation agent, our method realizes instantaneous delamination (

Date: 2024
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DOI: 10.1038/s41893-024-01389-5

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