A Fuzzy Collaborative Sensor Network for Semiconductor Manufacturing Cycle Time Forecasting

Yu-Cheng Lin, Toly Chen and Yu-Cheng Wang

International Journal of Distributed Sensor Networks, 2013, vol. 9, issue 3, 257276

Abstract: Network based sensing has become an important field of research, and it is expected that new applications of remote sensing will be developed. A fuzzy collaborative sensor network is developed in this study to predict the cycle time of a job in a semiconductor manufacturing factory, which is an important task for the factory. In the fuzzy collaborative sensor network, each sensor detects the status of a particular job as well as various environmental conditions present in the factory and uses a fuzzy neural network to analyze the received information. Each sensor communicates its settings and forecasting results to other sensors with the aid of a central control unit. According to the experimental results, the aggregate forecasting performance was considerably improved through the sensors' collaboration.

Date: 2013
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Persistent link: https://EconPapers.repec.org/RePEc:sae:intdis:v:9:y:2013:i:3:p:257276

DOI: 10.1155/2013/257276

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