 Low-temperature technology of receiving transition metal oxides and research of its structural featuresLado Jibuti ()
No 5808209, Proceedings of International Academic Conferences from International Institute of Social and Economic Sciences Abstract: In this work is given low-temperature technology of receiving transition metal oxides and electro-physical and optical parameters of received structures. Low-temperature technology is based on stimulated plasma anodizing method, stimulation of which is realized using UV light exposure on the wafer during anodizing process. Is considered characteristics of technological process, during which was selected optimal technological route. Separately considered titanium (TiO2), hafnium (HfO2) and zirconium (ZrO2) dioxides structural features, as an interesting materials for receiving nanodevices, like field effect transistor. On the received structures was measured C-V characteristics, thickness, surface roughness, optical launch spectrums and x-ray structure analysis was realized. Keywords: nanodevice; plasma anodizing; UV light; dioxide (search for similar items in EconPapers) Published in Proceedings of the Proceedings of the 33rd International Academic Conference, Vienna, Oct 2017, pages 151-151 Downloads: (external link) Related works: Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text Persistent link: https://EconPapers.repec.org/RePEc:sek:iacpro:5808209 Access Statistics for this paper More papers in Proceedings of International Academic Conferences from International Institute of Social and Economic Sciences |
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