Semiconductor Manufacturing Scheduling and Dispatching

Michele E. Pfund, Scott J. Mason and John W. Fowler
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Michele E. Pfund: Arizona State University
Scott J. Mason: Arizona State University
John W. Fowler: Arizona State University

A chapter in Handbook of Production Scheduling, 2006, pp 213-241 from Springer

Abstract: Abstract This chapter discusses scheduling and dispatching in one of the most complex manufacturing environments — wafer fabrication facilities. These facilities represent the most costly and time-consuming portion of the semiconductor manufacturing process. After a brief introduction to wafer fabrication operations, the results of a survey of semiconductor manufacturers that focused on the current state of the practice and future needs are presented. Then the chapter presents a review of some recent dispatching approaches and finally an overview of a recent deterministic scheduling approach is provided.

Keywords: Scheduling; dispatching; semiconductor manufacturing (search for similar items in EconPapers)
Date: 2006
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DOI: 10.1007/0-387-33117-4_9

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