ParChem: Efficient Numerical Methods for Chemical Problems related to MOVPE
E. Mesic,
M. Mukinovic,
L. Kadinski and
G. Brenner ()
Additional contact information
E. Mesic: University of Erlangen-Nürnberg, Institute of Fluid Mechanics
M. Mukinovic: TU-Clausthal, Institute of Applied Mechanics
L. Kadinski: University of Erlangen-Nürnberg, Institute of Fluid Mechanics
G. Brenner: University of Erlangen-Nürnberg, Institute of Fluid Mechanics
A chapter in High Performance Computing in Science and Engineering, Garching 2004, 2005, pp 51-62 from Springer
Abstract:
Abstract The prediction of MOVPE processes requires the modeling of numerous coupled transport phenomena for momentum, mass and heat including temperature dependent physical properties and chemical reactions. In the present paper, the numerical simulation is used as a tool to identify and distinguish systematically the chemical parameters in the AlGaN growth process in order to obtain a reliable and efficient prediction of the process.
Keywords: Growth Rate; Computational Mathematic; Transport Phenomenon; Computational Intelligence; Chemical Parameter (search for similar items in EconPapers)
Date: 2005
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Persistent link: https://EconPapers.repec.org/RePEc:spr:sprchp:978-3-540-28555-7_5
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DOI: 10.1007/3-540-28555-5_5
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